Semiconductor Equipment

NWL200

Micro/ Macro inspection system for 12" Wafers

In the semiconductor manufacturing process, wafers are following a trend toward ever greater thinness.  Nikon’s outstanding proprietary technology makes the NWL200 Series the first lineup of wafer loaders for inspection microscopes capable of loading 100um thin wafers. The NWL200 Series achieves highly reliable loading suitable for inspection of next-generation semiconductors.

New edge-detection technology and greater wafer sensing features allow for more accurate results. In addition to pattern side macro inspections of all areas, macro inspection of the back side periphery and back side center are supported as standard. Macro inspection parameters such as wafer rotation speed and tilt angle can be set automatically or manually.

Download brochure: NWL200.pdf